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Scanning Electron Microscopy (SEM)


UCEM has three Scanning Electron Microscopes:

Carl Zeiss Merlin FESEM

Field Emission Scanning Electron Microscope (FE-SEM) from Carl Zeiss

More Details

    • Location:

Level 5 KBC - C Building - Map to KBC can be found here

    • Technical Specification:

      - Accelerating voltage: 20 V - 30 kV
      - Electron emitter: Thermal field emission
      - Resolution (optimal WD): 1.4 nm @ 1 kV; 0.6 nm @ 30 kV (STEM mode)
      - Detector: In-lens SE, ET-SE, BSD, EsB, STEM, CCD, EDS
      - Stage configuration: 5-axes eucentric motorized
      - System control: SmartSEM GUISystem mode: High-vacuum @ RT or cryogenic temperature


Carl Zeiss Evo SEM

Scanning Electron Microscope (SEM) from Carl Zeiss

More Details

    • Location:

Level 5 KBC - C Building - Map to KBC can be found here

    • Technical Specification:

      - Accelerating voltage: 200 V - 30 k
      - Electron emitter: LaB6 crystalResolution (optimal WD): 9 nm @ 1 kV; 2 nm @ 30 kV
      - Detector: ET-SE, VPSE-G4, HDBSD, CCD, EDS, WDS, EBSD
      - Stage configuration: 5-axes motorized
      - System control: SmartSEM GUISystem mode: High-vacuum or variable/extended pressure (10-3000 Pa), RT or high-temperature (<1500 degree Celcius)



FEI Scios Dual Beam Microscope (FIB-SEM)

The Thermo Scientific™ Scios™ DualBeam™

More Details

    • Location:

UCEM facility in KBC building - Map to UCEM can be found here

    • Technical Specification:

      - Accelerating voltage: 20 V - 30 kV (EB); 500 V - 30 kV (IB)
      - Electron emitter: Thermal field emission
      - Ion emitter: Ga LMIS
      - Resolution (optimal WD): 1.6 nm @ 1 kV
      - Detector: Trinity T1/T2, ET-SE, ICE, DBS, CCD, Nav-Cam
      - Stage configuration: 5-axes eucentric motorized
      - System control: xT GUI with additional options (GIS, Micromanipulator, Plasma coater, ASV, AutoFIB, AutoTEM)
      - System mode: High-vacuum @ RT or cryogenic temperature

SEM Preparation Equipment

Gatan PECS II Broad Ion Beam Miller

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  • Technical Specification:

Fully automated argon ion polishing system suitable for preparation of SEM samples to prepare damage free surfaces, cross sections and deposit coatings to protect or eliminate charging.

- Polish, etch or coat samples with a single pump down.
- Etch at voltages as low as 100 V for rapid and damage free preparation of sample surfaces.
- Permit samples as large as 32 mm in diameter.
- Transfer samples from the PECS™ II instrument to a SEM/FIB or glovebox without exposure to air (optional).
- Store and analyze image in DigitalMicrograph® software from Gatan for digital optical imaging.
- Display and control all PECS II parameters using integrated 10-inch color touch screen

Quorum Q150T-ES Sputter Coater

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  • Technical Specification:

The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

- New touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one machine
- New software sorts recipes per user according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Capable of achieving vacuum of 5 x 10-5 mbar

Leica EM CPD300 Critical Point Dryer

More Details

  • Technical Specification:

The drying of biological specimens such as pollen, tissue, plants, insects, as well as industrial samples, for example MEMS (Micro Electro Mechanical Systems) for SEM analysis can be prepared in the Leica EM CPD300 Critical Point Dryer, fully automatically. To ensure a low CO2 consumption and a very short process time a new filler concept was developed. Special attention has been turned to your safety by implementing software controlled cut-off functions and integrating a waste separator.

- High Sample Quality Fully automated, reproducible and controlled processes ensure high sample quality every run.
- Sample Holders Wide variety of sample holders for all of your sample sizes.
- Safe and easy disposal of exchange fluid Integrated liquid waste separator ensures safe and easy disposal of exchange fluid avoiding direct contract with user.